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    • 7. 发明授权
    • Radial field electrostatic micromotor produced using a photolithographic
micromanufacturing technique and a process for producing said micromotor
    • 使用光刻机制造技术制造的放射状静电微型电动机和用于生产微型电动机的方法
    • US5180940A
    • 1993-01-19
    • US752580
    • 1991-09-11
    • Lionel ParatteEtienne BornandGeorges-Andre Racine
    • Lionel ParatteEtienne BornandGeorges-Andre Racine
    • H02N1/00
    • H02N1/004
    • A radial field electrostatic micromotor produced by photolithographic micromanufacture includes a stator provided with several groups of electrodes angularly offset from one another about an axis of rotation of the micromotor, an electrically conducting rotor at least one arm of which has a counter electrode adapted to cooperate with the stator electrodes to form an air gap therebetween, and a guide ring adapted to drive the rotor in rotation and possibly in translation. The micromotor has a rotor comprising at least one bridging element arranged at least partly above an electrostatic field plane (PCE) of the micromotor. The bridging element constitutes an elevated arm of the rotor having one or more mechanically or electricity functional members adapted to cooperate with one or more complementary members located in or outside the electrostatic field plane and inside or outside the group of stator electrodes. The micromotor is suitable for the stepwise driving of an extremely miniaturized mechanism in continuous rotation or in bi-directional rotation.
    • PCT No.PCT / CH91 / 00030 Sec。 371日期1991年9月11日 102(e)1991年9月11日PCT PCT 1991年2月6日PCT公布。 WO91 / 12650 PCT公开号 日本1981年8月22日。通过光刻微制造产生的径向场静电微电机包括定子,其具有围绕微电机的旋转轴线彼此成角度地偏离的几组电极,至少一个臂具有导电转子 适于与定子电极协作以在其间形成气隙的对电极,以及适于驱动转子旋转并可能平移的导环。 微型电动机具有转子,其包括至少部分地布置在微电动机的静电场平面(PCE)上方的至少一个桥接元件。 桥接元件构成转子的升高的臂,其具有一个或多个机械或电功能部件,其适于与位于静电场平面内或外的定子电极组内部或外部的一个或多个互补部件配合。 微型电动机适用于连续旋转或双向旋转中的极小型化机构的逐步驱动。